NEW! 3D optical interferometer with nm-resolution
date: 09.10.2014
A state-of-the-art 3D optical interferometer microscope that employs white or green light with sub-nm resolution for surface analyses has been installed in November 2012.
In the beginning of November a new 3D optical interferometer for the analysis of the surfaces with nm-scale resolution has been installed. Measurements are based on white and green light interference and is used for the measurements of surface topography, wear volumes and surface roughness parameters in 2D and 3D. The resolution of the measurement in X and Y direction is 40 nm and in the Z direction below 1nm.
More about 3D optical microscope - here.